Pulsed Laser Deposition (PLD)
Perform Pulsed Laser Deposition (PLD) with our uniquely powerful excimer lasers.
- Stoichiometric PLD Use our rugged COMPex lasers for stoichiometric PLD results.
- Large Area PLD Our high-power LEAP lasers deliver large areas of high performance thin films.
- Three-shift PLD Benefit from uptime and longevity offered by our field-proven excimer lasers.
High-Temperature Superconducting (HTS) Tapes
Excimer-based PLD is the only proven volume production method to make rare earth barium copper oxide (REBCO) films with the quality needed for multilayer HTS tapes.
RADIO FREQUENCY FILTERS
FOR 5G
Excimer laser PLD enables piezoelectric scandium-doped aluminum nitride (Sc: AlN) thin films for RF filters, delivering the piezo-response and high-frequency RF properties needed for 5G and beyond.
Diamond-like Carbon (DLC) Layers
Excimer lasers create hydrogen-free DLC layers in a low temperature PLD process and ensure very good adhesion to a wide range of materials via excimer laser annealing.
Thin Film Wafers
Excimer laser PLD can produce more complex and crystalline thin films over larger (up to 300 mm) wafers for use in MEMS, semiconductors, photovoltaics, and OLED displays.
Solid-State Thin-Film Batteries
PLD delivers advanced solid electrolytes, including anode and cathode materials, with adjustable density and stoichiometry as well as nanometer range thickness precision.
Transparent Conductive Oxides
(PLD) gently deposits high-uniformity transparent electrodes over sensitive organic layers, enabling buffer-free semi-transparent perovskite solar cells.
Video Spotlight:
High-Power Excimer Lasers for Thin Film Equipment at Solmates, Enschede
Using high-power, LEAP series excimer lasers, Arjen Janssens and colleagues at company Solmates, Enschede, The Netherlands develop innovative pulsed laser deposition equipment which will play a key role in the development of future chip designs and the integration of new thin-film materials. Learn more about laser technology in thin-film industries.
Featured Blog
Innovating MicroLED Display Manufacturing
Coherent's new UVtransfer systems is innovating MicroLED manufacturing with Laser Lift-Off (LLO), Laser-Induced Forward Transfer (LIFT), and repair/trimming.
Resource List
High Volume Production of Superconducting Wire/tape Using an Excimer Laser
SuperOx Japan delivered the highest ever volume of superconducting YbCO tape using a Coherent LEAP 300C excimer to power their pulsed laser deposition (PLD) process.
LEAP excimer lasers minimize the true cost per laser watt and enable lower-cost, high-volume production of HTS wire at SuperOx Japan.
Amplifier Stability Enables in-situ Studies of Ferroelectric Film Polarization
See how researchers successfully used Coherent Astrella/TOPAS to determine both the degree and direction of polarization, in films from zero to 20 unit cells (u.c.).
Amplifier thermal stability is critical. Our chamber runs at up to 950°C internally and heats the lab significantly during long experiments. The power, beam shape, and pointing of Astrella are all unaffected by these ambient changes.
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