Lasers | Coherent
Discover our powerful, versatile workhorse UV lasers delivering hundreds of millijoules of pulse energy with high pulse to pulse stability and excellent beam uniformity.
Setting performance and lifetime standards in versatile excimer lasers, COMPex delivers superior results in demanding applications, such as pulsed laser deposition (PLD), wafer debonding, laser lift-off (LLO), solid sampling (LA-ICP-MS), wire stripping, and FBG writing.
Overview of COMPex Performance Parameters
Compact, easy to integrate excimer laser with single phase supply. Choice of maximum repetition rates from 10 Hz to 100 Hz, with maximum pulse energies up to 750 mJ.
|Model Name||Output Wavelength (nm)||Max. Pulse Frequency (Hz)||Max. Pulse Energy (mJ)||Max. Power (W)|
|COMPex 50 FBG||248||100||140||12|
Pulsed Laser Deposition (PLD)
Utilize powerful excimer lasers for pulsed laser deposition (PLD) supporting research or volume production.
Get laser solutions that drive innovations in flat panel and display performance and production, especially for mobile devices.
Support fabs from the most advanced transistor nodes to legacy nodes by locating and avoiding defects, and processing advanced materials like low-κ dielectrics.