Lasers | Coherent

COMPex


Discover our powerful, versatile workhorse UV lasers delivering hundreds of millijoules of pulse energy with high pulse to pulse stability and excellent beam uniformity.

Setting performance and lifetime standards in versatile excimer lasers, COMPex delivers superior results in demanding applications, such as pulsed laser deposition (PLD), wafer debonding, laser lift-off (LLO), solid sampling (LA-ICP-MS), wire stripping, and FBG writing. 


Overview of COMPex Performance Parameters

Compact, easy to integrate excimer laser with single phase supply. Choice of maximum repetition rates from 10 Hz to 100 Hz, with maximum pulse energies up to 750 mJ.

Product Specifications

Model Name  Output Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W)
COMPex 50 193 50 100 4
COMPex 102 20 240 4.8
COMPex 110 100 240 12
COMPex 201 10 400 4
COMPex 205 50 400 15
COMPex 50 FBG 248 100 140 12
COMPex 50 50 150 7
COMPex 102 20 400 8
COMPex 110 100 400 30
COMPex 201 110 750 7.5
COMPex 205 50 750 33
COMPex 102 308 20 250 5
COMPex 110 100 250 16
COMPex 201 10 500 5
COMPex 205 50 500 20
COMPex 102 351 20 200 4
COMPex 110 100 200 12
COMPex 201 10 300 3
COMPex 205 50 300 15

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