Introducing the COMPex F2: The Most Powerful VUV Laser Available

Our newest COMPex excimer laser offers dual wavelength capability at 157 nm and 193 nm, enabling ablation of tough and/or transparent materials.

March 08, 2022 by Coherent


Today, we’re introducing the newest member of the Coherent COMPex family: the Coherent COMPex F2 — the most powerful VUV laser.

Our new dual-wavelength laser meets the needs of applications demanding a powerful source of vacuum ultraviolet wavelengths. Specifically, the F2 provides direct output at both 157 nm or 193 nm, simply by switching the gas fill, which maximizes its utility and value.

Some key applications of COMPex F2

  • LA-ICP-MS analysis of stone and ice samples
  • Pulsed Laser Deposition (PLD) of special materials
  • Direct patterning and micromachining of PDMS and PTFE (Teflon®)

Laser ablation LA-ICP-MS (Laser Ablation Inductively Coupled Plasma Mass Spectrometry) is a versatile tool that provides elemental composition analysis of solid samples without any sample prep. VUV is needed here for many rock and arctic ice samples.

PLD is a fast-growing method for the deposition of thin films. With shorter wavelengths, the material spectrum in layer generation can be expanded. The same applies to the field of material processing. At wavelengths of 157 nm and 193 nm, even materials such as high-purity quartz, polydimethylsiloxane (PDMS), and even PTFE (Teflon®) can be patterned with high precision.


Some key advantages of COMPex F2

  • Vacuum UV operation at 157 nm or 193 nm
  • 32 mJ stabilized pulse energy at 157 nm
  • 50 Hz repetition rate
  • Airtight beam path with vacuum flange access

From a practical viewpoint, the new COMPex F2 laser brings all the advantages of the COMPex family. 1) They are highly effective light sources, featuring a compact design and easy installation and operation. 2) They offer unmatched pulse energy and pulse to pulse stability, excellent beam uniformity, and industrial-grade 24/7 reliability.

COMPex lasers also set the standard in most 248 nm and 308 nm ultraviolet wavelength applications. These applications include PLD thin film growth, as well as wafer debonding that underpins many types of microelectronics applications.

COMPex lasers are also used in the latest Coherent UVtransfer tool that enables automated production of next-generation MicroLED displays.

Like other COMPex lasers, the COMPex F2 is backed by a comprehensive warranty covering 36 months from the date of invoice or 1 billion pulses, whichever comes first. We also provide free installation services.

Learn more about the Coherent COMPex family and our newest VUV excimer laser: the COMPex F2