Ion Implantation

Ion Implantation Foundry Services

Rely on us for full-service partnership for your ion implantation needs. We can reliably support any volume, any application, and the capacity to meet demand spikes.

Coherent world-class ion implantation foundries can meet all forms of implant requirements, from production volumes of 300 mm wafers down to R&D on smaller wafer sizes and chips, as well as heated implants on compound semiconductor substrates.

Key Capabilities

Unmatched Experience

Coherent leverages the most experienced ion implant applications team in the industry to provide the fastest and most cost-effective methods to optimize customer success on:

  • Silicon and compound semiconductor substrates
  • Heated and room-temperature implants
  • Research and development
  • Implant modeling and process matching
  • Small wafer sizes

Reliable Partner

Use Coherent as your implant partner to:

  • Take advantage of expanding or changing markets
  • Recover from unplanned ion implant system failures
  • Outsource some or all ion implant process steps
  • Support 48-hour turnaround time

Comprehensive Materials

  • Silicon
  • GaAs/InP
  • SiC
  • GaN
  • Diamond
  • LiNbO3/LiTaO3
  • InSb
  • ZnSe
  • SiO2/Si

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Featured Video

Powering the Future of Photonics with Ion Implantation

From facial recognition in smartphones to high-speed data in AI-driven data centers, today’s connected world runs on precision lasers. These advanced photonic devices are the foundation of modern sensing and communication.

This video highlights how ion implantation enhances laser performance — enabling tightly focused beams, improved thermal stability, and advanced multi-junction designs. It plays a vital role in isolating laser channels, reducing crosstalk, and boosting speed and reliability.

You will also learn how VCSELs and EELs differ and why both are essential to cutting-edge applications. With decades of expertise and a global foundry model, Coherent offers end-to-end ion implantation services, from simulation to high-volume wafer processing — helping you innovate faster and smarter.

▶️ Watch now to see how ion implantation is shaping the future of photonics — and how Coherent can help elevate your designs.

Featured Video

Ion Implantation For Semiconductor Devices

Ion implantation is a technique where ions are accelerated to high speeds and then implanted into a semiconductor compound. This process allows precise control over electrical carrier levels and distributions allowing to tailor the electrical properties of the material with high accuracy. Coherent is the world's largest ion implantation foundry and offers various services to meet our clients' needs.