Lasers | Coherent
Get rugged, high-duty cycle industrial excimer lasers designed for up to 2 kHz pulse repetition rate applications at 193 nm or 248 nm wavelengths.
Production line tools delivering reliability, longevity, ease of use, and advanced pulse control. IndyStar lasers are widely used in ink jet nozzle drilling, metrology and optics testing. Semi-S2 compliant for use in photomask inspection and related applications.
Overview of Key IndyStar Performance Metrics
Operate at 193 nm or 248 nm with repetition rates up to 2 kHz and power up to 12 watts.
|Model Name||Wavelength (nm)||Max. Pulse Frequency (Hz)||Max. Pulse Energy (mJ)||Max. Power (W)|
|IndyStar 1 kHz||193||1000||8||8|
|IndyStar 2 kHz||2000||4|
|IndyStar 1 kHz||248||1000
|IndyStar 2 kHz||2000||6|
Support fabs from the most advanced transistor nodes to legacy nodes by locating and avoiding defects, and processing advanced materials like low-κ dielectrics.
Discover laser systems for electronics manufacturing that perform fast, high-precision cutting, welding, marking, and ablation of metals and plastics.
Pulsed Laser Deposition (PLD)
Utilize powerful excimer lasers for pulsed laser deposition (PLD) supporting research or volume production.