Semiconductor Manufacturing

Support fabs from the most advanced transistor nodes all the way to legacy nodes by locating and avoiding defects, and processing advanced materials like low-κ dielectrics.

  • Highest Resolution Work at the highest resolution with a wide selection of short wavelength lasers.
  • Improved Sensitivity Increase defect detection sensitivity and process faster with higher powers and shorter laser wavelengths.
  • UV Reliability Enjoy exceptional reliability in UV and DUV lasers thanks to our unsurpassed experience.
Semiconductor Manufacturing Lasers

Wafer Inspection

Ultraviolet laser sources that provide high power for speed or enhanced detection sensitivity, plus the longest operational lifetime and uptime characteristics.


Success Stories

The high pulse energy of LEAP enables fast deposition and annealing. The stable output and flat-top beam profile give us precise control over both the deposition and annealing processes
Hagen Grüttner Project ANTACON, University of Applied Sciences Mittweida, Germany

New Excimer Process Rapidly Creates Super Hard DLC Films at Low Temperatures

Learn how the Mittweida team at University of Applied Sciences have achieved a hardness of up to 70 GPa with Young’s moduli of 700 to 800 GPa which leads to an extremely high operational wear resistance.

Global Customers


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