离子注入

离子注入机 Disk 翻新和涂敷

Ion Implanter Disk Refurbishment and Coating

通过 Coherent Disk 翻新和涂敷服务，延长离子注入工具的使用寿命、降低拥有成本并提高其性能。

Coherent 拥有广泛的能力，可以修复、翻新和再制造任何离子注入机 Disk 或散热器。这包括自 20 世纪 70 年代末至今生产的所有品牌和型号的批量处理离子注入机。

关键能力

数据表

It All Adds Up

Our industry-leading innovations enable a 2x lifetime improvement, a 99% decrease in wafer chipping, a 50% decrease in metals contamination, an 80% decrease in fence “wear-grooving” particle generation, and a 30% average cost-of-ownership savings.   

High-Performance Coatings

The Coherent low-temperature elastomer pedestal and heat sink coating increases wafer cooling, boosts productivity, and improves pad-to-pad wafer temperature uniformity.  

Torlon Fence Assemblies

Utilize high wear resistance Torlon to dramatically improve fence and disk lifetime, substantially decrease wafer chipping, cut fence wear-grooving, and lower metals contamination.

改进了栅栏设计

Coherent 高精度旋入式轴承栅栏设计具有更长的使用寿命，不会出现栅栏不对称磨损，并消除了 OEM 压接位置组件中出现的粒子陷阱。