激光系统
VarioLas
基于功能强大的 COMPex 准分子激光器的系统是灵活的工具，适用于对线光束或方形光束场形状进行高质量紫外光微加工。
卓越的光学设计、牢固的结构和具有无与伦比的脉冲间稳定性的准分子激光器可提供精确的效果。 应用包括激光剥离 (LLO) 分离、掺杂剂离子活化、烧蚀制图和薄膜退火。
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