Laser Machines and Systems

VarioLas


Systems based on the powerful COMPex excimer laser are flexible tools for high quality UV microprocessing with a line beam or a square beam field shape.

Superior optical design, rugged mechanics, and an excimer laser with unmatched pulse-to-pulse stability deliver precision results. Applications include Laser Lift-Off (LLO) Separation, Dopant Ion Activation, Ablative Patterning, and Thin Film Annealing.


VarioLas – Some Key Performance Metrics

Get precise ablation or material modification results with the high (up to 7.5 J/cm2) energy density and 100 Hz pulse repetition frequency of VarioLas.

 

Product Specifications

Parameter  

VarioLas Eco 

VarioLas Pro 

VarioLas Sweep 

Field Shape 

Square  

Square  

Line  

Field Size (mm2) 

2 x 2 

2 x 2 

50 x 0.6 

Optical Resolution (µm) 

30 

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