激光系统
LineBeam
LineBeam 系统是一种支持性光学技术，适用于在大型基板上大规模制造 LTPS 背板，良率极高。
为高达 Gen 10.5 的面板尺寸提供长达 1500 mm 的线光束轮廓。 具有为实现产能和光束利用率最大化而设计的长短轴光束同质性。 出色的脉冲稳定性和深景深可确保提供较大的工艺窗口。
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