VarioLas
VarioLas

VarioLas

VarioLas processing systems based on the powerful COMPex excimer​ laser are flexible tools for high-quality UV microprocessing. Superior​ optics design, rugged mechanics and unmatched pulse-to-pulse stability​ are the key ingredients to each VarioLas model available at 193 nm,​ 248 nm, and 308 nm.​

VarioLas Key Features & Benefits
High-resolution optics and mechanics ensure reproducible results
Modular design with tailored options for flexible use
Square beam and line beam fields for optimum results
Compatible with all COMPex laser models to enable efficient processing

Applications

Application
Process
Material

Laser Lift-Off
Dopant Activation
Heat Treating
Semiconductor

Features & Benefits


VarioLas Model
VarioLas Eco
VarioLas Pro
VarioLas Sweep
Field Geometry
Square
Square
Line
Substrate Field Size (mm2)
2 x 2
2 x 2
50 x 0.6
Optical Resolution (μm)
30
5
-
Working Distance (mm)
50
50
150
Max. Repetition Rate (Hz)
100
100
100
Max. Energy Density (mJ/cm2) at 193 nm
2500
2500
500
Max. Energy Density (mJ/cm2) at 248 nm
7500
7500
1300
Max. Energy Density (mJ/cm2) at 308 nm
6000
6000
1000
Energy Stability (%, 1 sigma) at 193 nm
2
2
2
Energy Stability (%, 1 sigma) at 248 nm
1
1
1
Energy Stability (%, 1 sigma) at 308 nm
1
1
1