SiC Substrates & Epitaxy
SiC for Power Electronics
Fabricate MOSFETs, IGBTs, and other components for high-temperature, high-frequency power electronics used in electric and hybrid vehicles, and aerospace applications.
Our conductive SiC substrates combine low resistivity, low defect density, high homogeneity, superior crystal quality, and high thermal conductivity to enable devices with low power dissipation, high-frequency operation, and good thermal stability.
n-type Silicon Carbide Material Properties
Coherent continuously improves our materials quality and increases substrate diameters to enable our customers to increase device performance and lower costs.
n-type Silicon Carbide Material Properties |
|
Physical Characteristics |
|
Structure |
Hexagonal, Single Crystal |
Diameter |
Up to 200 mm |
Grades |
Prime, Development, Mechanical |
Thermal Properties |
|
Thermal Conductivity |
370 (W/mK) at room temperature |
Thermal Expansion Coefficient |
4.5 x 10-6/K |
Specific Heat (25°C) |
0.71 (J/g°C) |
Additional Key Properties of Coherent SiC Substrates (typical values) |
|
Parameter |
N-type |
Polytype |
6H |
Dopant |
Nitrogen |
Resistivity |
> 1019 Ohm -cm |
Orientation |
4° off-axis |
Roughness, Ra |
<5Å |
Dislocation density |
~3,000 cm-2 |
Micropipe density |
< 10cm-2 |
Related Products
Featured Blog
SiC Circuitry Makes EVs Better
Coherent is one of the few companies worldwide with a complete, vertically integrated SiC manufacturing capability. We produce SiC wafers and epitaxy, all the way through power devices and modules. Furthermore, the unmatched quality with which we can produce SiC material makes Coherent virtually the only supplier positioned to successfully transition from the current standard wafer diameter of 150 mm up to 200 mm.
Featured Blog
Thirty Meter Telescope International Observatory: Optics From Coherent Give Telescopes a Bright Future
Coherent supplies optics and optical fabrication technology for one of the most ambitious astronomy projects ever conceived – the Thirty Meter Telescope.