Laser Machines and Systems
LineBeam
LineBeam systems are the enabling optical technology for mass manufacturing of LTPS backplanes on large substrate panels with the highest yield.
Deliver line beam profiles up to 1500 mm long for panel sizes up to Gen 10.5. Feature short and long axis beam homogeneity for maximum throughput and beam utilization. Superior pulse stability and high depth of field ensure a large process window.
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LineBeam – Some Key Performance Metrics
Benefit from the top hat beam profile of LineBeam, with excellent homogeneity in both short and long axes, all at a short wavelength of 308 nm or 355 nm.
Product Specifications
Parameter |
Values |
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Line Length (mm) |
750 |
1000 |
1300 |
1500 |
Beam Profile Type |
Top-hat along both axes |
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Depth of Focus (µm) |
±150 |
±120 |
±120 |
±120 |
Long Axis Homogeneity (%) |
0.6 (2σ) |
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Short Axis Homogeneity (%) |
0.8 (2σ) |
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