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Coherent
Line Beam
Line Beam
LineBeam

System for excimer laser crystallization annealing applications.

LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is progressing to even longer line beams for annealing larger areas, employing new excimer lasers with more and more pulse energy.

Line Beam Optical System

308 nm excimer laser annealing, enables market growth of faster, brighter, thinner and more leightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility.

Applications
Application
Process
Material

Excimer Laser Annealing
Surface Modification
Semiconductor
Features & Benefits

LineBeam Model
LineBeam 465
LineBeam 750
LineBeam 1000
LineBeam 1300
Wavelength (nm)
308
308
308
308
Laser Pulse Energy (mJ)
1050
2000
4000
4000
Max. Repetition Rate (Hz)
600
600
600
600
Energy Density (mJ/cm2)
350
430
435
435
Line Beam Length (mm)
465
750
1000
1300
Line Beam Width (µm)
350
400
580
450
Long Axis Homogeneity (%, 2 sigma)
1.8
1.8
1.8
1.8
Short Axis Steepness (µm)
125
125
125
125
Depth of Focus (µm)
±150
±150
±120
±120

LineBeam Key Features
Excellent Beam Profile Homogeneity
Outstanding Optics Lifetime
Display Industry Proven Technology; Large Installation Base Worldwide
Standard Technology for Silicon Annealing Process (LTPS-LCD, OLED)
Accessories for LineBeam
Micro Smoothing Device
Short Axis Fine Tuner
Beam Profiler
Pulse Expander Module
Beam Stabilization Unit
Beam Symmetry Generator
Short Axis Online Monitor
CB E-Sigma Monitor
P-Lens Entrance Monitor
SB E-Sigma Monitor

Related Materials

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Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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