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COMPex

The Excimer Laser – Market Leading UV-Technology

The Excimer Laser – Market Leading UV-Technology

COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD) and precise material processing.

The COMPex provides multi-hundred millijoules output, plus unmatched pulse-to-pulse stability. The COMPex also comes with an improved gas processor that extends both gas and optics lifetimes.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
COMPex 50
193
50
100
4
COMPex 102
20
240
4.8
COMPex 110
100
240
12
COMPex 201
10
400
4
COMPex 205
50
400
15
COMPex 50 FBG
248
100
140
12
COMPex 50
50
150
7
COMPex 102
20
400
8
COMPex 110
100
400
30
COMPex 201
10
750
7.5
COMPex 205
50
750
33
COMPex 102
308
20
250
5
COMPex 110
100
250
16
COMPex 201
10
500
4
COMPex 205
50
500
20
COMPex 102
351
20
200
4
COMPex 110
100
200
12
COMPex 201
10
300
3
COMPex 205
50
300
15
Applications
Application
Process
Material
Pulsed Laser Deposition
Polymer Marking
Laser Lift-Off
Engraving
Heat Treating
Plastic
Semiconductor
Ceramic
Features & Benefits
COMPex Features & Benefits
UV-energy stability better than 0.75% (1 Sigma)
Ultimate Pulse Control (UPC) allows precise processing at the single pulse level
Instant Energy Switching (IES) for online adaption of the energy during processing
Data recording and extracting of all system parameters

​

Accessories for COMPex
COMPex Low-Divergence Resonator Optics 193, 248 nm
COMPex100 Low-Divergence Resonator Optics 193, 248, 308 nm
COMPex 200 Low-Divergence Resonator Optics 193, 248, 308 nm
Low-Divergence Resonator Adapter (COMPex 50, 100, 200)
Beam Aligner
Temperature Stabilization Module
Pre-mounted windows set for quick optics exchange
VCR Upgrade Kit (VCR gas connections instead of Gyrolok)
Related Materials
Case Studies
Documents
Application Report Laser Activated Vapour Phase Processes For Nanoelectronic Fabrication
Application Report Laser Activated Vapour Phase Processes For Nanoelectronic Fabrication
Thin Wafer Laser Debonding Fast and Without Fuss
Thin Wafer Laser Debonding Fast and Without Fuss
Test & Measurement tools for this Coherent Laser
FieldMaxII TO
FieldMaxII-TO
FieldMaxII-TOP
FieldMaxII-TOP

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