UVtransfer/UVtransfer-R - Level-Maintenance

Course Description: The UVtransfer Maintenance-level course prepares students to maintain the application system. Students will be informed about the safety aspects of the application system and all primary sources of hazards. Course content ranges from basic theory of tool functions to basic system operation and maintenance procedures. Extensive hands-on laboratory hours allow students to test their knowledge and develop the skills needed to perform maintenance on the application system safely.

Topics: Fundamentals of laser device and optical beam path; Basics of donor/receiver stage systems; Wafer handling and alignment; Overview of diagnostics modules and Media Supply Unit; Safety aspects and sources of hazards. Operation of system modules and components; Performance checks; System maintenance procedures, such as energy/attenuator calibration, laser gas exchange, replacement of laser and beam-delivery system windows, filter exchange, mask handling, and stage parameter calibration.

Prerequisites: Complete product knowledge requires a basic understanding of electrical/electronic functions and optical physics. Students should be able to read and speak English or the local language, depending on the training center's location. Some basic knowledge of how to read technical schematics and/or block diagrams would be very helpful.