
The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics.
Model Name | Wavelength (nm)
|
Max. Pulse Frequency (Hz)
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Max. Pulse Energy (mJ)
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Max. Power (W)
|
VYPER | 308
|
600
|
2000
|
1200
|
TwinVYPER | 600
|
4000
|
2400
| |
TriVYPER | 600
|
6000
|
3600
|
VYPER/TwinVYPER/TriVYPER Key Feature
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Customer Benefit
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Multi-Kilowatt Stabilized UV Power
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Fast, large area annealing at lowest costs per Watt
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2, 4, or 6 Joule nano-second UV pulse
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High silicon annealing efficiency and throughput
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Multiple beam combination
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Outstanding energy stability by superimposition effect
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TimeLok
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Stable trigger-to-pulse delay
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Laser data acquisition
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Evaluation of laser performance best supported by optional ExiScone software
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Ethernet interface
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Fast remote control and data transfer
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Touch panel hand-held terminal
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Intuitive laser operation
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Sealed and purged beam path
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Highest UV transmission efficiency and optics lifetime
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Pulse shape analysis
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Monitoring of nano-second laser pulses
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Motorized optics mounts (optional)
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Remote beam adjustment via hand-held control panel
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