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Vyper
Vyper

VYPER

The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
VYPER
308
600
2000
1200
TwinVYPER
600
4000
2400
TriVYPER
600
6000
3600

Applications

Application
Material
• Excimer Laser Annealing
• Semiconductor

Features & Benefits

VYPER/TwinVYPER/TriVYPER Key Feature
Customer Benefit
Multi-Kilowatt Stabilized Output Power
Fast, large area processing at lowest costs per Watt
ExiScope Software (optional)
Onboard logging and evaluation of laser parameters
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Adjustable Pulse Energy
Advanced process control
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel
Solid-State Switch
Maintenance-free operation
Purged, External Resonator Design
Highest beam stability and optics lifetime
Corona Preionization
Stable, homogeneous output
Metal Ceramic Tube
Extended tube lifetime
Energy Monitor
Preset, stabilized energy output