General Optics
Micro Lens Arrays
Create highly compact collimation and focusing systems using our one- or two-dimensional microlens arrays (MLAs).
Coherent MLAs are typically configured with the individual lenslets arranged in a square or hexagonal periodic pattern, with a lens pitch of a few hundred micrometers. They can be fabrication using nanoimprinting, photolithography, and glass molding.
Micro Lens Array Capabilities
Coherent can produce MLAs with a wide variety of structures in various materials. High volume production of near infrared MLAs can be accomplished on 6 inch Si wafers.
Silicon Microlens Array Specifications
Material Specifications |
|
Material |
Silicon |
Reflective index |
≈ 3.42 |
Transparency |
R <0.2% T >99% @ 1260-1340 nm |
Fabrication Specifications |
|
Diameter |
600 ±5 μm |
Thickness |
400 ±10 μm |
Pitch |
750 ±1 μm |
Clear Aperture |
>510 nm |
Radius of curvature |
3.0 mm |
Conic |
0 |
Surface roughness |
<5 nm RMS |
Lens surface profile deviation |
<35 nm RMS |
Surface quality |
Scratch-dig: 5/1x0.025 base on ISO 10110-7 |
Chipping |
<100 μm |
Edge verticality |
90 ±2° |
