Optics
Lithium Niobate Wafers
Use Lithium Niobate's unique combination of high refractive index and visible and infrared transmission to makes waveguides, modulators, and sensors on our wafers.
Lithium niobate is a multifunctional material with high chemical and heat stability. Its high refractive index (>2.3) compared with glass (1.5) enables a large field-of-view when fabricated in wafer form for waveguide design.
Lithium Niobate Wafer
Depend on Coherent, with over a decade of experience in Lithium Niobate wafer manufacturing, to provide wafers that meet your exact requirements.
Material Specifications |
|
Material |
Congruent: LiNbO3 |
Material quality |
Bubble or inclusion <100 μm Qty <8, 30 μm < bubble size < 100 μm |
Orientation |
Y cut ±0.2° |
Density |
4.65 g/cm3 |
Curie temperature |
1142 ±1℃ |
Transparency |
>95% for 10 mm thickness over 450 - 700 nm |
Fabrication Specifications |
|
Diameter |
150 mm ± 0.2 mm |
Thickness |
350 μm ± 10 μm |
Flatness Total thickness variation(TTV) Local thickness variation (LTV) Bow Roughness |
<1.3 μm Warp < 70 μm @ 150 mm wafer <70 μm @ 150 mm wafer Rq ≤0.5 nm (RMS value by AFM) |
Surface quality |
40-20 |
Particles |
Non-removable particles: 100-200 μm ≤3 particles, 20-100 μm ≤20 particles |
Chip |
<300 μm (full wafer, without exclusion zone) |
Crack |
No crack (full wafer) |
Contamination |
No non-removable stain (full wafer) |
Parallelism |
<30 arc second |
Orientation refer flat (x-axis) |
47 ±2 mm |
