离子注入
离子注入机 Disk 翻新和涂敷
通过 Coherent Disk 翻新和涂敷服务，延长离子注入工具的使用寿命、降低拥有成本并提高其性能。
Coherent 拥有广泛的能力，可以修复、翻新和再制造任何离子注入机 Disk 或散热器。这包括自 20 世纪 70 年代末至今生产的所有品牌和型号的批量处理离子注入机。
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关键能力
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It All Adds Up Our industry-leading innovations enable a 2x lifetime improvement, a 99% decrease in wafer chipping, a 50% decrease in metals contamination, an 80% decrease in fence “wear-grooving” particle generation, and a 30% average cost-of-ownership savings. |
High-Performance Coatings The Coherent low-temperature elastomer pedestal and heat sink coating increases wafer cooling, boosts productivity, and improves pad-to-pad wafer temperature uniformity. |
Torlon Fence Assemblies Utilize high wear resistance Torlon to dramatically improve fence and disk lifetime, substantially decrease wafer chipping, cut fence wear-grooving, and lower metals contamination. |
 改进了栅栏设计 Coherent 高精度旋入式轴承栅栏设计具有更长的使用寿命，不会出现栅栏不对称磨损，并消除了 OEM 压接位置组件中出现的粒子陷阱。 |
精选博客
Coherent，离子注入领域的领先企业
代工服务为半导体制造商提供从研发到批量生产的全面支持。
精选成功案例
三十米望远镜国际天文台：Coherent 光学器件为望远镜带来光明的未来
Coherent 为雄心勃勃的“三十米望远镜”天文项目提供光学器件和光学制造技术。
