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Coherent
Vyper
Vyper
VYPER

Multiple beam, excimer lasers that feature kilo-watts of UV power and pulse energies of 2 or 4 Joules at 600 Hz repetition rate.

The VYPER Series

The VYPER is a multiple beam, very high power excimer laser providing the highest energy stability at 308 nm by maintaining 1200 or 2400 Watts. It features two (VYPER) or four (TwinVYPER) perfectly synchronized laser beams to be merged by an external beam mixing device to 2 or 4 Joules per pulse. This laser platform features a number of innovative technologies for unsurpassed performance and reliability.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
VYPER
308
600
2000
1200
TwinVYPER
600
4000
2400
Applications
Application
Material

Excimer Laser Annealing
Semiconductor
Features & Benefits

VYPER/TwinVYPER Key Feature
Customer Benefit
Multi-Kilowatt Stabilized Output Power
Fast, large area processing at lowest costs per Watt
ExiScope Software (optional)
Onboard logging and evaluation of laser parameters
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Adjustable Pulse Energy
Advanced process control
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel
Solid-State Switch
Maintenance-free operation
Purged, External Resonator Design
Highest beam stability and optics lifetime
Corona Preionization
Stable, homogeneous output
Metal Ceramic Tube
Extended tube lifetime
Energy Monitor
Preset, stabilized energy output

Accessories

Part Number
Accessory for VYPER/TwinVYPER
1226717
Analysis Software ExiScope
1269634
Additional EMO Button Guard, SEMI
1187052
Cable Duct, 160 mm x 80 mm x 1200 mm
1224269
Fast Photodiode Mounted (external Oscilloscope required)
1255022
Motorized Optics Modules VYPER
1202009
Pulse Shape Analysis Module incl. Fast Photodiode and Digitizer
1207313
Upgrade Kit, 1200 Hz Operation, VYPER
1180124
15-Meter Cable for Hand-Held Terminal; Five (5) meter cable comes with laser.
1228700
Mains Cable LAMBDA SX, 60 kVA, 25m (two mains cables per VYPER required
1136304
STEP UP TRANSFORMER 60 kVA (two transformers per VYPER required)

Related Materials

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