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Coherent
VarioLas
VarioLas
VarioLas Family

Affordable tools for high quality UV microprocessing. VarioLas UV material processing systems based on the COMPexPro 100 Excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each of the VarioLas systems, which are available for the common excimer laser wavelengths 193 nm, 248 nm and 308 nm.

The VarioLas Eco, VarioLas Pro and VarioLas Sweep are available for the common excimer laser wavelengths of 193 nm, 248 nm and 308 nm.

VarioLas Key Features
Coherent Excimer Laser Inside
Large Field Size for Parallel Processing
Line Beam Availability
Superior Pulse-to-Pulse Stability
Unmatched Processing Stability
Modular Concept with Upgrading Options
Applications
Application
Process
Material

Laser Lift-Off
Dopant Activation
Heat Treating
Semiconductor
Features & Benefits

VarioLas Model
VarioLas Eco
VarioLas Pro
VarioLas Sweep
Field Geometry
Square
Square
Line
Substrate Field Size (mm2)
2 x 2
2 x 2
50 x 0.6
Optical Resolution (μm)
30
5
-
Working Distance (mm)
50
50
100
Max. Repetition Rate (Hz)
100
100
100
Max. Energy Density (mJ/cm2) at 193 nm
1000
1000
230
Max. Energy Density (mJ/cm2) at 248 nm
3500
3500
600
Max. Energy Density (mJ/cm2) at 308 nm
3000
3000
500
Energy Stability (%, 1 sigma) at 193 nm
2
2
2
Energy Stability (%, 1 sigma) at 248 nm
1
1
1
Energy Stability (%, 1 sigma) at 308 nm
1
1
1


Accessories

Part Number Safety Options
1161813 Class 1 Housing
1161812 Automated Safety Class 3 Interlock Circuit
1107556 Automated Beam Shutter for 193 nm
1107557 Automated Beam Shutter for 248 nm
1157558 Automated Beam Shutter for 308 nm
Part Number Control Options
1161814 Control PC (with monitor)
1161815 Substrate Stage (3 axes incl. substrate chuck)
1161816 Observation Unit (for VarioLasPro, 193 nm)
1161817 Observation Unit (for VarioLasPro, 248 nm and 308 nm)
1161818 Observation Unit (for VarioLasPro, all wavelengths)
1161819 Motorized Attenuator (upgrade)
1161820 Motorized Attenuator, Energy Control, Pro/Eco, 193 nm
1161821 Motorized Attenuator, Energy Control, Pro/Eco, 248 nm
1161822 Motorized Attenuator, Energy Control, Pro/Eco, 308 nm

Related Materials

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