Ask a Question
Coherent
UVblade

UV System for Laser Lift-Off Applications.

Laser lift-off (LLO) is the key technology in manufacturing flexible digital displays where thin-film transistor device structures are typically fabricated directly onto a polymer layer that has been spun on a glass substrate.

Systems for Laser Lift-Off Applications

UVblade selectively detaches the polymer-based displays of all types from their rigid glass carriers. UVblade supports glass substrate generations up to Gen 8.

Applications
Application

Laser Lift-Off
Features & Benefits

UVblade Model
UVblade 250
UVblade 380
UVblade 465
UVblade 750
Wavelength (nm)
308
308
308
308
Laser Pulse Energy (mJ)
580
580
900
950
Repetition Rate (Hz)
200
200
300
300
Energy Density (mJ/cm2)
270
235
235
235
Beam Length (mm)
250
380
465
750
Beam Width (µm)
400
300
400
250
Homogeneity Long Axis (%, 2 sigma)
1.8
1.8
1.8
1.8
Steepness Short Axis (µm)
100
70
70
70
Depth of Focus (µm)
±200
±200
±150
±150

UVblade Key Features
Cost Effective Laser Optical Solutions for Laser Lift-Off (LLO)
Single Shot Processing
Highest Beam Utilization
Homogeneous Energy Distribution
Includes Coherent Excimer Laser

Accessories

Accessories for UVblade
BeamScout Beam Profiler Package

Related Materials

Call 1-800-227-8840


Outside the U.S. 1-408-764-4983

Coherent has locations across the globe that are available to provide support for any product, service or inquiry.

Visit our Contact Page to connect with any of our global sites.


Corporate Headquarters
Coherent Inc.
5100 Patrick Henry Drive
Santa Clara, CA 95054 USA

email: tech.sales@coherent.com

Send Us a Message

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


I have read the terms and conditions