Ask a Question
Coherent
Home Lasers Excimer Lasers & UV Beam Delivery IndyStar
IndyStar

Heavy duty performance and highest efficiency excimer laser.

IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser.

Fast Pulse, High Precision Processing

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
IndyStar 1 kHz
193
1000
8
8
IndyStar 2 kHz
2000
4
IndyStar 1 kHz
248
1000
12
12
IndyStar 2 kHz
2000
6
Applications
Application
Material
Photomask Inspection
Semiconductor
Features & Benefits
IndyStar Key Feature
Customer Benefit
Semi-S2 Certified Design
High uptime
Corona Preionization
Stable, homogeneous output
Solid-State Switch
Maintenance-free operation
Almeta Tube
Extended tube lifetime
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Energy Monitor
Preset, stabilized energy output
Single Phase Supply
Easy integration

Accessories

Part Number
Accessory for IndyStar
1285557
External Heat Exchanger KB200VE Pro 19”; cooling capacity 2 kW; water-to-air
Related Materials
Case Studies
Documents
Application Report Phase Shift Mask Measurements With Excimer Lasers
Application Report Phase Shift Mask Measurements With Excimer Lasers
Proofing of photolithographic phase shift masks
Proofing of photolithographic phase shift masks
Test & Measurement tools for this Coherent Laser
FieldMaxII TO
FieldMaxII-TO
LabMax-TOP
LabMax-TOP

Call 1-800-227-8840


Outside the U.S. 1-408-764-4983

Coherent has locations across the globe that are available to provide support for any product, service or inquiry.

Visit our Contact Page to connect with any of our global sites.


Corporate Headquarters
Coherent Inc.
5100 Patrick Henry Drive
Santa Clara, CA 95054 USA

email: tech.sales@coherent.com

Send Us a Message

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


I have read the terms and conditions