UV Processing Solutions

UV Processing Solutions

Beam delivery systems for lift-off separation, drilling, patterning, and annealing.

Coherent develops, designs, and manufactures UV and VUV optical systems, modules, and components for Scientific, Medical, and Industrial applications. Sample preparation and job shop services are available for a wide variety of material processing using 351 nm, 308 nm, 248 nm, 193 nm, and 157 nm wavelengths.

Coherent's optical systems, modules, and components are manufactured for use with excimer lasers with easy integration into new and existing micromachining workstations and production lines.

UVblade
Cost-efficient production tool for UV laser lift-off (LLO) applications.
UVblade
LineBeam
LineBeam for Excimer Laser Annealing (ELA) of silicon films.
LineBeam
VarioLas Family
Tool for research and development of micromachining applications.
VarioLas
GeoLasPro
Automated, high-end, DUV-system for solid sampling.
GeoLasPro
UV Optical Components
Making the most of a UV laser beam.
UV Optical Components
 

UV Processing Solutions
Wavelength (nm)
Beam Geometry
Approx. Beam Dimensions
Approx. Energy Density
Laser Options
UVblade
308
Line
(250-750 mm) x 0.3 mm
0.3 J/cm2
LEAP, LAMBDA SX
LineBeam
308
Line
(750 - 1300 mm) x 0.4 mm
0.4J/cm2
VYPER, TwinVYPER
VarioLas
193, 248, 308
Line or Rectangular
50 mm x 0.6 mm or 2 mm x 2 mm
0.2-5 J/cm2
COMPexPro, LPXpro
GeoLasPro
193
Round Spot
4-160 µm
1-45 J/cm2
COMPexPro
 
 
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