Indystar excimer laser

Excimer Lasers and Applications

Powerful and versatile light sources in the UV range of the electromagnetic spectrum. Because of their cold ablation and short wavelength, excimer lasers are used for countless applications.


 

2015 Excimer / UV Optical Systems Product Catalog

Excimer / UV Optical Systems Product Catalog 2015

Excimer / UV Optical Systems Product Catalog 2015
Excimer-Based Optical Systems . . .

More InformationCoherent's excimer-based optical systems for use with excimer lasers are easily integrated into new and existing micromachining workstations and production lines.

 



Coherent excimer laser helps scientists uncover secrets of Stonehenge.

Coherent has established an optimized, field-proven excimer laser portfolio at all performance levels from compact ultraviolet (UV) light sources and high-power excimer lasers to complete beam delivery systems.

Excimer lasers are available in the following UV laser wavelengths: 157 nm, 193 nm, 248 nm, 308 nm and 351 nm. Browse our catalog of Excimer laser products and applications in the tabs below.

 

BraggStar M
High pulse energy excimer laser enabling creation of FBGs with higher contrast.
BraggSTarr M laser
ExciStar XS
Small size and high reliability, stand alone or OEM, UV laser.
IndyStar
Compact excimer laser now up to 2000 Hz repetition rate.
IndyStar
COMPexPro
Medium power for material processing, science, and use in medical OEM systems.
CompexPro
LPXpro
LPXpro lasers offer a broad range of pulse energies from 120 mJ up to 1.1 Joule.
LEAP
Economical industrial excimer laser providing 150 Watts of UV power.
LAMBDA SX
The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing.
LAMBDA SX
VYPER
New twin beam, very high power excimer lasers that provide the highest energy stability at 308 nm.
VYPER
UV Processing Solutions
Beam delivery systems for lift-off separation, drilling, patterning, and annealing.
UV Processing Solutions
 
 
Product Family
Wavelength (nm)
Max. Pulse Energy (mJ)
Max. Power (W)
Max. Rep. Rate (Hz)
ExciStar XS
157
2
0.5
500
LPFpro
157
50
7
200
ExciStar XS
193
10
2.5
500
IndyStar
193
8
8
2000
COMPexPro
193
400
15
100
LPXpro
193
400
50
300
ExciStar XS
248
12
4
500
IndyStar
248
12
12
2000
BraggStar M
248
140
12
100
COMPexPro
248
700
30
100
LPXpro
248
800
80
400
LEAP
248
1000
150
200
LAMBDA SX
248
1000
300
300
COMPexPro
308
500
20
100
LPXpro
308
600
55
200
LEAP
308
1000
150
200
LAMBDA SX
308
1000
600
600
VYPER
308
4000
2400
600
ExciStar XS
351
5
2
500
COMPexPro
351
300
15
100
LPXpro
351
300
26
200

 

 

Application
Material
Product
Ablation-Material Removal
Ablation Material Removal
3D-Structuring
Ceramic, Glass, Polymer
• LAMBDA SX
• LEAP
• LPXpro
etch barrier patterning
Etch Barrier Patterning
Semiconductor
• LEAP
• LPXpro
ink jet nozzle
Ink-Jet Nozzle Drilling
Plastic
• LAMBDA SX
• LEAP
interferometric nanostructuring
Interferometric Nanostructuring
Glass, Plastic
• LPXpro
Roll to roll circuit patterning
Roll-To-Roll Circuit Patterning
Metal, Plastic
• LAMBDA SX
• LEAP
solid sample analysis
Solid Sample Analysis
Ceramic, Composite, Glass, Metal, Semiconductor
• GeoLasPro
Engraving
excimer marking
Diamond and Eye Glass Marking
Diamond, Glass, Plastic
• ExciStar XS
• 
polymer marking
Polymer Marking
Plastic
• COMPexPro
Heat Treating
laser lift off
Laser Lift-Off
Semiconductor
• COMPexPro
• LPXpro
• VarioLas Family
Marking
excimer marking
Diamond and Eye Glass Marking
Diamond, Glass, Plastic
• ExciStar XS
polymer marking
Polymer Marking
Plastic
• COMPexPro
Sub-Surface Modification
Fiber Bragg Grating Production
Glass
• BraggStar Series
• LPXpro
Surface Coating
surface coating
Diamond Like Carbon Coating
Composite, Metal
• LEAP
• LPXpro
Pulsed Laser Deposition
Ceramic
• COMPexPro
• LAMBDA SX
• LEAP
Surface Modification
Automotive Cylinder Hardening
Metal
• LAMBDA SX
Dopant activation
Dopant Activation
Semiconductor
• LPXpro
• VarioLas Family
Laser Annealing
Excimer Laser Annealing
Semiconductor
• LAMBDA SX
• LineBeam
• VYPER
photomask inspection
Photomask Inspection
Semiconductor
• IndyStar
lateral solidification
Sequential Lateral Solidification
Semiconductor
• CrystaLas Optical System
• LAMBDA SX
 

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Catalogs and Brochures 2 file(s) - Click to expand or collapse list

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