Indystar

Excimer Lasers

Powerful and versatile light sources in the UV range of the electromagnetic spectrum. Because of their cold ablation and short wavelength, excimer lasers are used for countless applications.



Coherent excimer laser helps scientists uncover secrets of Stonehenge.

Excimer / UV Optical Systems
Product Catalog 2012

Excimer / UV Optical Systems Product Catalog 2012

Excimer Based Optical Systems . . .

More InformationCoherent's Excimer based optical systems for use with excimer lasers are easily integrated into new and existing micromachining workstations and production lines.

 
lasers, laser tools, laser machine, laser applications, laser machines, laser system, laser systems, laser products, laser solutions, laser machine tools Related Applications . . .

Coherent has established an optimized, field proven excimer laser portfolio at all performance levels from compact ultraviolet (UV) light sources, and high power excimer lasers to beam delivery systems.

 

Excimer lasers are available in the following UV laser wavelengths - 157 nm, 193 nm, 248 nm, 308 nm and 351 nm.

 

BraggStar Series
Versatile UV light source optimized for writing fiber Bragg gratings.
BraggStarr laser
ExciStar XS Series
Small size and high reliability, stand alone or OEM, UV laser.
Xantos XS
Easy set-up and fast results to meet you laser needs.
IndyStar Series
Compact excimer laser now up to 2000Hz repetition rate.
IndyStar
COMPexPro Series
Medium power for material processing, science, and use in medical OEM systems.
CompexPro
LPXpro Series
LPXpro lasers offer a broad range of pulse energies from 120 mJ
up to 1.1 Joule.
LEAP Series
Economic industrial excimer laser providing 130 Watts of UV power.
LAMBDA SX-Series
The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing.
LAMBDA SX
VYPER
New twin beam, very high-power excimer lasers providing the highest energy stability at 308 nm.
VYPER
UV Optical Systems, Modules and Components
For scientific, medical and industrial applications.
Crystal Las Optical System
 

Application
Material
Product
Ablation-Material Removal
Ablation Material Removal
3D-Structuring
Ceramic, Glass, Polymer
• LAMBDA SX-Series     • LEAP Series     • LPXpro Series    
etch barrier patterning
Etch Barrier Patterning
Semiconductor
• LEAP Series     • LPXpro Series    
ink jet nozzle
Ink-Jet Nozzle Drilling
Plastic
• LAMBDA SX-Series     • LEAP Series    
interferometric nanostructuring
Interferometric Nanostructuring
Glass, Plastic
• LPXpro Series    
Roll to roll circuit patterning
Roll-To-Roll Circuit Patterning
Metal, Plastic
• LAMBDA SX-Series     • LEAP Series    
solid sample analysis
Solid Sample Analysis
Ceramic, Composite, Glass, Metal, Semiconductor
• GeoLasPro    
Engraving
excimer marking
Diamond and Eye Glass Marking
Diamond, Glass, Plastic
• ExciStar XS Series     • Xantos XS    
polymer marking
Polymer Marking
Plastic
• COMPexPro Series    
Heat Treating
laser lift off
Laser Lift-Off
Semiconductor
• COMPexPro Series     • LPXpro Series     • VarioLas Family    
Marking
excimer marking
Diamond and Eye Glass Marking
Diamond, Glass, Plastic
• ExciStar XS Series     • Xantos XS    
polymer marking
Polymer Marking
Plastic
• COMPexPro Series    
Sub-Surface Modification
sub-surface modification
Fiber Bragg Grating Production
Glass
• BraggStar Series     • LPXpro Series    
Surface Coating
surface coating
Diamond Like Carbon Coating
Composite, Metal
• LEAP Series     • LPXpro Series    
pulsed laser deposition
Pulsed Laser Deposition
Ceramic
• COMPexPro Series     • LAMBDA SX-Series     • LEAP Series    
Surface Modification
surface modification
Automotive Cylinder Hardening
Metal
• LAMBDA SX-Series    
Dopant activation
Dopant Activation
Semiconductor
• LPXpro Series     • VarioLas Family    
Laser Annealing
Excimer Laser Annealing
Semiconductor
• LAMBDA SX-Series     • LineBeam    
photomask inspection
Photomask Inspection
Semiconductor
• IndyStar Series    
lateral solidification
Sequential Lateral Solidification
Semiconductor
• CrystaLas Optical System     • LAMBDA SX-Series    
 
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