The intention of the development of the excimer laser series ExciStar XS was to design a compact excimer laser with lowest investment costs, but also with superior performance, which can be used even in industrial applications. These requirements led to an excimer laser with extremely compact size that offers exceptional performance and lifetime characteristics at repetition rates of 200Hz and 500Hz.

ExciStar XS combines a number of Coherent’s innovations in excimer laser technology to deliver high reliability, low maintenance downtime and long lifetime. Main features are:

Extremely compact size
The ExciStar XS is designed to meet special demands for cost sensitive applications. Its the smallest and lightest excimer laser available at Coherent with dimensions of 649 x 300 x 400 mm (L x W x H) and a weight of only 58kg. Nevertheless no compromises were done for the overall performance of the ExciStar XS due to the integration of an all-metal-sealed tube design (Almeta XS), corona preionization and a solid state switch.

New tube design “Almeta XS”/ Corona preionization and Solid state switching
The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the AlmetaXS tube with corona pre-ionization and a solid-state-switch. This results in extended lifetimes for these laser components. The “soft” discharge created by the solid state switch results in high pulse to pulse energy stability. In combination with corona preionization a more homogenous discharge is created with excellent pulse characteristics. A dust remover, always included in the tube design, acts as a trap for generated dust particles in the laser gas by collecting them via an electrostatic force in order to extend the overall components lifetime.

Air cooling, single phase / Use of premix laser gas
The ExciStar XS is a purely air cooled excimer laser system, which makes installation and operation as easy as possible. The laser operates with a single electrical phase and with a premix laser gas bottle. In addition its small footprint integrates into your lab space, not consume it.

Different versions
The Excistar XS series is mainly available in two different versions depending on the desired repetition rate. Up to 200 and 500Hz are possible according to the used application.

In addition an energy monitor is possible to integrate into the laser in case of operation in an “energy constant”-mode.

Furthermore besides the “Standard” stand-alone version an OEM-version is available for integration into a larger tool by integrators.

The unique combination of processing capabilities, small size and low cost of ownership makes the ExciStar XS series particularly well-suited to different kind of applications, especially in marking.