
High power industrial excimer laser providing highly stabilized UV power.
The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor. It is designed to deliver the best energy stability available and also features a number of innovative technologies for unsurpassed performance and reliability. It is available from 300 Watts (248 nm and 308 nm) to 600 Watts (308 nm only).
The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro-structuring, and all other applications which require high UV laser throughput.
Model Name | Wavelength (nm)
|
Max. Pulse Frequency (Hz)
|
Max. Pulse Energy (mJ)
|
Max. Power (W)
|
LAMBDA SX K300 | 248
|
300
|
1000
|
300
|
LAMBDA SX C300 | 308
|
300
|
1000
|
300
|
LAMBDA SX C600 | 600
|
1000 | 600
| |
LAMBDA SX E300 | 300
|
1050
|
315
| |
LAMBDA SX E500 | 500
|
1000
|
500
|
LAMBDA SX Key Feature
|
Customer Benefit
|
High Stabilized UV Power
|
Fast, large area processing at lowest costs per Watt
|
ExiScope Software (optional)
|
Onboard logging and evaluation of laser parameters
|
PowerLok
|
Smooth burst cycles
|
TimeLok
|
Stable trigger-to-pulse delay
|
Adjustable Pulse Energy
|
Advanced process control
|
Motorized optics mounts (optional)
|
Remote beam adjustment via hand-held control panel
|
Solid-State Switch
|
Maintenance-free operation
|
Purged, External Resonator Design
|
Highest beam stability and optics lifetime
|
Corona Preionization
|
Stable, homogeneous output
|
Metal Ceramic Tube
|
Extended tube lifetime
|
Energy Monitor
|
Preset, stabilized energy output
|
Accessories
Accessory for LAMBDA SX
|
Analysis Software ExiScope
|
Fast Photodiode
|
STEP UP TRANSFORMER 30 kVA
|
STEP UP TRANSFORMER 60 kVA
|
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