Coherent Inc.
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LAMBDA SX-Series
High-Power Excimer Laser Series

High-Power KrF (248 nm) or XeCl (308 nm) industrial excimer laser providing highly stabilized UV power.
Coherent Inc.
Measurement tools for this laser:

  • PowerLok burst operation mode energy stabilization
  • TimeLok trigger-to-pulse stabilization and time jitter reduction
  • Single laser pulse detection software
  • Hand-held terminal with advanced laser control software
  • RS-232 interface
  • Purged external resonator design for long-life laser optics and optimum beampointing stability
  • Unique smooth ceramic preionization for homogeneous beam profile and excellent pulse-to-pulse stability
  • Advanced internal gas purification system for extended operation of laser gas and tube windows
  • Slide valves with premounted tube windows for fast and secure tube window exchange
  • NovaTube® technology for outstanding gas and tube lifetimes
  more...

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