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Excimer

Excimer lasers are powerful and versatile light sources in the UV range of the electromagnetic spectrum. Because of their cold ablation and short wavelength excimer lasers are used for countless applications.
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Coherent has established an optimized,
field proven excimer laser portfolio at
all performance levels:

  • compact ultraviolet (UV) light sources
  • high-power excimer lasers
  • beam delivery systems


Excimer lasers applications include:

  • Laser Vision Correction 
  • Pulsed Laser Deposition 
  • Micromachining
  • Reel to Reel Direct Patterning
  • Silicon Annealing
  • Fiber Bragg Grating Writing


Excimer lasers from Coherent are available in the following UV laser wavelengths:

157 nm, 193 nm, 248 nm, 308 nm and 351 nm.


See our Excimer based optical systems

For use with excimer lasers with easy integration into new and existing micromachining workstations and production lines.

      Ultra-compact, lightweight, highly reliable UV light source
      World’s first excimer laser featuring integrated gas management with a pre-mixed gas cylinder.
      Small excimer laser up to 1000Hz repetition rate.
      Versatile UV light source with excellent coherence performance.
      Medium average power for material processing, science, and use in medical OEM systems.
      Medium-Power F (193, 248, 351 nm), XeCl (308 nm) or F2 (157, 193 nm) multi-purpose excimer laser providing a broad range of UV power.
      Economic KrF (248 nm) or XeCl (308 nm) industrial excimer laser providing 130 Watts of UV power.
      High-Power KrF (248 nm) or XeCl (308 nm) industrial excimer laser providing highly stabilized UV power.

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