Coherent offers a range of laser based process tools based upon our Intelligent Optical Systems (IOS) product portfolio. There are two tool types available to cell manufacturers: AethonTM Platform - a workstation optimized for R&D and Process Development Coherent EquinoxTM Products - a production ready family for either low-volume Pilot lines or high-throughput Fabs. Each tool has generic process features, summarized in the following table. Additional capabilities are outlined within the IOS Brochure which can be downloaded below. To learn more about IOS tool variants optimized for your specific applications and environment, please contact us with your requirements.   Aethon Equinox-Pilot Equinox-Fab-TT Equinox-Fab-CB   Aethon Workstation click on the photo above to view data sheet Equinox-Pilot Workstation click on the photo above to view data sheet Equinox-Fab-TT Workstation click on the photo above to view data sheet Equinox-Fab-CB Workstation click on the photo above to view data sheet R&D optimized     Production optimized   XYZ wafer-stage       Multi-wafer turntable       Multi-wafer horizontal conveyor belt     multi-station turntable inline conveyor belt Single or multi-wafer processing single-wafer single-wafer multi-wafer multi-wafer Throughput (wafers/hour) R&D and process qualification only several hundred up to ~1000 (application specific) up to several thousands (application specific) up to several thousands (application specific) Laser Source Options Each IOS tool can incorporate up to three separate Coherent laser sources from the AVIA, Talisker and Paladin product families. AVIA, Talisker, or Paladin lasers   Brochure: Download and print our new Solar Process Tools Brochure. Coherent at PV Hamburg: See the latest in solar process tools from Coherent

There are many different applications for lasers within Solar cell manufacturing. Each of crystalline-Silicon and Thin-Film has its own set of manufacturing processes - and therefore laser based applications. The table below lists the key applications for our lasers. As the Solar industry is in high-growth mode, and the manufacturing processes are continually improving, many of the laser applications now at R&D stage are expected to move to volume production within the next few years. Comprehensive feature articles for most applications have been published recently in solar trade magazines, and can be downloaded via the hyperlinks below.

Crystalline-Silicon
Edge Isolation	Laser Scribing Tools Edge in Front Edge isolation process summary Laser vs Etching solutions AVIA laser systems and tools
Laser Grooved Buried Contacts	How Buried Contacts Brought Lasers to Life LGBC as a guide to tool manufacturers Synergy between LGBC and high efficiency concepts AVIA laser systems and tools
Texturing
Selective Ablation	Lasers Go Short for Dielectric Ablation of Silicon Solar Cells Dielectric Ablation summary Passivation process Talisker, AVIA and Excimer lasers
Wrap-Through	Lasers Take the Wrap Wrap-through process summary Solar hole drilling vs Semi TSV's AVIA laser systems and tools for MWT
Dopant Diffusion	Laser-assisted Selective Emitters and the Role of Laser Doping Review of all laser steps for different selective emitter concepts Review of different laser doping processes
Laser Fired Contacts
Thin Film
a:Si Patterning	Scribing Thin Film Solar Focus on a:Si process Scribe requirements Laser optimization IR & green ns lasers Prisma lasers
CIGS Patterning
Glass Cutting	Laser Cutting Strengthens Thin-Film Glass Panels Solar glass cutting with lasers Benefits vs. mechanical cutting Lessons from displays sector E-400 CO2 lasers
CdTe Patterning

Video: A detailed look at Lasers in the Solar Industry

For each application - both in crystalline-Silicon and Thin-Film - there are typically one or two lasers that can be used for the process, depending on the process time and quality required. Click on the product name hyperlinks to take you to the product pages for more information including product data sheets.

Coherent Lasers in Solar Cell Applications
	AVIA	Excimer	Talisker	Paladin	PRISMA	Diamond E-400	MATRIX	Mamba	HighLight
Crystalline-Silicon
Edge Isolation
Laser Grooved Buried Contacts
Texturing
Selective Ablation
Wrap-Through
Dopant Diffusion
Laser Fired Contacts
Soldering
Thin Film
a:Si Patterning
CIGS Patterning
CdTe Patterning
Glass Cutting
Border Deletion
BIPV Perforation

To ensure the performance of laser-based systems used in solar manufacturing is maintained at optimum levels, its vital to maintain a laser metrology capability.

End users and integrators in the solar industry will benefit from the ability to monitor laser health and status, a troubleshooting & diagnostic capability, and rapid delivery of diagnostics equipment

For more information on systems commonly used to measure the lasers used in solar processing, please visit our Laser Measurement & Control section of the Coherent web site.

Brochure: Download and print our Solar Laser Products Brochure

View a selection of feature articles that discuss the latest developments for lasers in the Solar industry. If you need guidance on citation format or are looking for permission to reproduce any of the information found here, please contact us at Solar@Coherent.com as copyright exists on all information contained here. Feature Articles

Photonics Online, November 2009 VOTED #1 in Photonics Online's          TOP 10 ARTICLES OF 2009 List Update on lasers Historical review Market dynamics & trends	InterPV, September 2009 Released at EU PVSEC meeting in Hamburg New classification for laser processes Timelines for lasers
ILS, July 2009 Updated laser tooling forecasts Pull from high-efficiency cells Thin-film utilization rate impact on laser scribers	Laser Focus World, May 2009 New perspective on laser tooling introduction within solar industry Application drivers Laser source forecasting
Photovoltaics World, March/April 2009 High efficiency cell concepts LGBC Dielectric ablation AVIA, Talisker lasers	Photovoltaic International, March 2009 Update on lasers in solar Laser-based tools Tooling trends Material interactions
Solar Industry Magazine, February 2009 Supply chain of lasers in solar Issues for fab integration Challenges for supply chain	PV Magazine, January 2009 DPSS lasers as 'green tools' Benefits to c-Si producers Challenges to laser adoption Dielectric ablation Talisker,AVIA lasers
Photovoltaic International, August 2008 Value chain for lasers Edge isolation, LGBC Wrap-thru', LFC Thin-film patterning AVIA, Talisker, Prisma lasers	Semiconductor International, August 2008 Cost of ownership Production yields Edge isolation Thin-film patterning AVIA, Prisma lasers
Industrial Laser Europe, May 2008 Applications overview Thin-film patterning DPSS laser portfolio Edge isolation AVIA, Prisma, Matrix lasers	Photonics Spectra, April 2008 c-Si roadmap Edge isolation LGBC UV absorption AVIA lasers

Market Trends Learn more about how solar and lasers have overlapped during the past 300 years. The image below is taken from a talk given in November 2009 for the Silicon Valley PV Society at PARC in Palo Alto. A shortened version of the presentation can be downloaded here also. To understand more about where the solar industry is going, what drives the techologies used, and the role of Coherent lasers and tools, please have a read through some recent online articles featured within the solar press. PV Times, December 11, 2009 PV equipment supply-chain emits selective messaging PV Society, December 10, 2009 PV's 20/20 vision demands cost-efficiency duality PV Times, September 29, 2009 EU PVSEC highlights new equipment landscape for solar cell production PV Times, August 10, 2009 Unlocking laser tools' potential in c-Si cell fabs PV Times, July 9, 2009 Supply-demand dynamics call 'time' on legacy cell production technology Trade Coverage PV iMicroNews, May, 2009 Marking 100th AVIA for solar production Success in laser Edge Isolation InterPV, April, 2009 Coverage of new Coherent products for Solar AVIA lasers with 28W & 48W at 355 New Paladin laser with 16W mode locked picosecond pulses at 355 Laser Focus World, April, 2009 Preview of OIDA Green Photonics conference Update on Solar’s role within ‘Green’ Photonics i-Micronews PV Manufacturing, October, 2008 Coherent's role in solar Market dynamics UV laser applications Customer alignment Talisker lasers EuroAsia Semiconductor, October, 2008 Announcing release of 28W 355 AVIA for PV applications Previewing new high-energy picosecond Talisker laser for dielectric ablation Letter in Photon International, August, 2008 Letter to the editor Role of lasers for c-Si Interview in Laser Magazine, March 2008 Laser types in solar Market trends Applications overview LGBC AVIA, Prisma lasers Press Releases     100th AVIA Laser Ships for Solar Cell Production, Apr.2009   New Lasers Increase Throughput, Mar.2009   Picosecond Talisker, Oct.2008   28W UV AVIA,Sept.2008

Industry Presentations
Silicon Valley PV Society, November 2009 Lasers and solar since 1700 History of lasers used within solar manufacturing High-efficiency cells & future trends	Laser Munich, June 2009 Laser process update Key applications summary Role of selective emitters
OIDA Optomism, May 2009 Focus on high-efficiency c-Si cells Processing benefits from short-pulse and short-wavelength lasers Laser-assisted selective emitters	LFW Marketplace Seminar, January 2009 Lasers in solar Historical perspectives and market size Forecasted trends impacting laser tooling
PV Meeting Semicon Europa, October 2008 Presentation slides Lasers in solar review Trends to UV & ps AVIA, Prisma, Matrix Talisker, Paladin lasers	CLEO PhAST, May 2008 Presentation slides Applications overview Case studies UV, ns & ps lasers Excimer laser options
Conference Papers
PV Meeting Semicon Europa, October 2008 Applications update Laser adoption Material interactions Market dynamics AVIA, Talisker lasers	Photonics West,January 2008 Thin-film patterning Focus on a:Si panels Scribe requirements Laser selection Prisma lasers